Microfabricated Systems and MEMS V
Top-down micrographs were then generated for the same general region (the uncertainty being due to manual alignment on the tools) using a Nikon OPTIPHOT 200 optical inspection scope at 1500X and a Digital Instruments 3100 SPM in aanbsp;...
| Title | : | Microfabricated Systems and MEMS V |
| Author | : | |
| Publisher | : | The Electrochemical Society - 2000-01-01 |
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