Microfabricated Systems and MEMS V

Microfabricated Systems and MEMS V

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Top-down micrographs were then generated for the same general region (the uncertainty being due to manual alignment on the tools) using a Nikon OPTIPHOT 200 optical inspection scope at 1500X and a Digital Instruments 3100 SPM in aanbsp;...

Title:Microfabricated Systems and MEMS V
Publisher:The Electrochemical Society - 2000-01-01

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